| abstract |
The invention relates to an etching solution composition for etching silver or a silver-containing film and a preparation method thereof. According to the etching solution composition of the present invention, in the etching process of silver or silver-containing metal film, residues are improved without damaging the lower film, and the generation of precipitates is prevented, and when fine wiring is formed, deviation defects can be minimized by minimizing deviation defects to improve the etching characteristics. |