| abstract |
The invention belongs to the technical field of production of supporting raw materials in the integrated circuit manufacturing industry, and particularly relates to a carborane fluorine-containing photoinitiator and a preparation method and application thereof. Firstly, carborane, anhydrous tetrahydrofuran, n-hexane solution of n-butyllithium, 4-iodoanisole and pyridine solution of potassium permanganate are reacted in nitrogen protection device to prepare biscarboxyl carborane; Carborane and fluorine-containing photoinitiator are further reacted in DMF, and with the assistance of weak alkaline acid binding agent, carborane fluorine-containing photoinitiator for EUV photoresist is finally prepared. The photoresist prepared by the photoinitiator overcomes the problems of short storage time, poor light transmittance, low resolution, and difficulty in removing residues of traditional photoresist, and can further improve the performance of the photoresist. , 5G mobile phones and other fields have great potential and broad application prospects. |