| abstract |
The invention is a flexible heart sound sensor based on PDMS-silicon nano-film, belonging to the technical field of semiconductors. The sensor is composed of a silicon nanofilm and a flexible substrate PDMS. The silicon nanofilm includes a piezoresistive region, an ohmic contact region and an alloy region, and the alloy region is made of an alloy of chromium and gold. During preparation, an oxide layer is formed on the top of the SOI sheet, an ohmic contact region is formed after the diffusion of concentrated boron, a piezoresistive region is formed after etching the top layer silicon, an alloy region is formed after sputtering, etching the metal and annealing, and the buried oxide layer is etched and corroded Then, the eaves structure is formed, and the buried oxide layer is drilled to form a suspended silicon nanomembrane structure, and finally the silicon nanomembrane is transferred to the flexible substrate PDMS. The sensor has high sensitivity, and at the same time, due to the flexible substrate PDMS, the adaptability and convenience of the sensor are increased. |