| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fc4336d376f51e8db6290bb64a1699dd |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-332 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-352
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3435
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32788
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32743
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-34 |
| filingDate |
2020-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_822ed7fed509f21df0fd33ae903196c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3613026b050958c785406de63ce7c981 |
| publicationDate |
2022-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-114902371-A |
| titleOfInvention |
sputter deposition |
| abstract |
A sputter deposition apparatus comprising: a substrate support assembly arranged to support a substrate; a target support assembly arranged to support at least one sputter target for sputter deposition of a target material onto a substrate; a plasma generating apparatus that provides a plasma for said sputter deposition; and a cassette arranged to receive a substrate with a deposited target material after said sputter deposition. The cassette can be removed from the sputter deposition apparatus. |
| priorityDate |
2019-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |