http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114899080-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_40492166001a8c1f462a8440c7e46814 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-063 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-1475 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-147 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-26 |
| filingDate | 2022-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45dff046a49244fcdb198734187869ae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5eebe3bdba4ab087198bd30e819343c8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5c94beb42c056379709285fb8228c83 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4f00225304e9639e20096348bc24cc8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8426df8d7301bfc48a91a4a80a01c5fe |
| publicationDate | 2022-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114899080-A |
| titleOfInvention | Ion mass analyzer and ion implantation device |
| abstract | The invention discloses an ion mass analyzer and an ion implantation device. The ion mass analyzer comprises a magnetic yoke, a first magnetic pole and a second magnetic pole arranged in the magnetic yoke and arranged symmetrically up and down, and the first magnetic pole and the second magnetic pole located in the first magnetic pole and the second magnetic pole A beamline cavity between and for the mixed ion beam to pass through in a certain route, a first coil wound on the first magnetic pole, and a second coil wound on the second magnetic pole; both the first magnetic pole and the second magnetic pole are fan-shaped, and the first The incident surfaces of the first magnetic pole and the second magnetic pole are concave surfaces, the exit surfaces of the first magnetic pole and the second magnetic pole are convex surfaces, and the curvature of the concave surface is -0.8 to -0.5, and the curvature of the convex surface is 0.45 to 0.6; The included angle between the beam line and the normal line of the incident surface is 56.5°˜60°, and the included angle between the deflected ion beam line and the normal line of the exit surface is −10.5°˜−13° during output. The resolution of the ion mass analyzer of the present invention is greater than 200. |
| priorityDate | 2022-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.