abstract |
The invention discloses a method for determining 111 crystal orientation single crystal silicon crystal line, which comprises the following steps: pre-arranging a chemical corrosion agent, placing the tail section of the crystal rod in the chemical corrosion agent for corrosion, so that pits appear on the surface of the single crystal, The proportioning method of chemical corrosion reagents is to pour sodium hydroxide and pure water into the reactor, mix and stir, so that sodium hydroxide and pure water are mixed to form an alkaline solution; pour the prepared alkaline solution into the inside of the container, in A hollow ring is placed at the bottom of the container, the container is placed on the top of the electric furnace, the electric furnace is controlled to be energized, the electric furnace heats the container, and the container heats the alkali solution inside. The invention has the advantages of high efficiency and convenience, and solves the problems that the current method for determining the crystal line of single crystal silicon is inconvenient to quickly determine the crystal line of single crystal silicon, the determination process is complicated, and the processing cost of single crystal silicon is increased. |