| abstract |
The invention belongs to the technical field of microelectronics, and discloses a micromechanical resonator with a coupling structure and a preparation method thereof. The micromechanical resonator includes a substrate silicon wafer and a resonator structure layer, the substrate silicon wafer has a cavity structure, the resonator structure layer includes a resonator oscillator and an anchor point structure, the resonator oscillator includes a vibration structure and a coupling structure, and the vibration structure is a piezoelectric Laminated structure, the coupling structure only contains device layer silicon, the number of coupling structures is one or more, the coupling structure is connected to the vibration structure, and the coupling structure is located outside the vibration structure, and the resonator is connected to the substrate silicon chip through the anchor point structure , the resonator and the anchor point structure are suspended above the cavity structure of the substrate silicon wafer. The invention can improve the Q value and temperature stability of the resonator. |