http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114859649-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_105b6f01d9ecae0f98b17ef96ad24fef |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-0102 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-0121 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-163 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-15 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-163 |
| filingDate | 2022-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b6121f360e7d5c51ecb7c7e284cd9d8 |
| publicationDate | 2022-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114859649-A |
| titleOfInvention | Reticle, lithographic apparatus and method for making a reticle |
| abstract | The present disclosure relates to a reticle, a lithography apparatus, and a method for manufacturing the reticle. The reticle includes: an electrolytic reaction layer, wherein metal elements in the electrolytic reaction layer are configured to be in a deposited metal state or a dissolved ion state; a first control circuit layer, the first control circuit layer is disposed on the first side of the electrolytic reaction layer, and the first control circuit layer includes a plurality of first control electrodes; and the second control circuit layer, the second control circuit layer is disposed on the electrolytic reaction layer on a second side opposite to the first side, and the second control circuit layer includes a plurality of second control electrodes; wherein the light-transmitting state of the pixel area in the reticle is configured to be controlled by the first control electrode included in the pixel area The control voltage between at least a part of the electrode and at least a part of the second control electrode is determined, and the control voltage controls the light transmission state of the pixel region by controlling the deposition amount of metal in the electrolytic reaction layer. |
| priorityDate | 2022-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.