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filingDate 2022-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2022-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-114823527-A
titleOfInvention semiconductor device
abstract The present disclosure proposes a semiconductor device. The semiconductor device includes a dielectric fin between the first semiconductor channel and the second semiconductor channel. The semiconductor device includes a first gate structure. The first gate structure includes a first portion and a second portion separated from each other by a dielectric fin. The semiconductor device includes a first gate spacer extending along sidewalls of the first portion of the first gate structure. The semiconductor device includes a second gate spacer extending along sidewalls of the second portion of the first gate structure. At least one of the first gate spacer or the second gate spacer includes a first portion having a first thickness and a second portion having a second thickness, the second thickness being less than the first thickness, and wherein the first portion is thicker than the second portion Also get close to the dielectric fins.
priorityDate 2021-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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