abstract |
A bump forming apparatus, a bump forming method, a solder ball repairing apparatus, and a solder ball repairing method, which aim at high reliability in the formation of extremely minute solder bumps. The bump forming apparatus of the present invention supplies solder balls to electrode pads formed on a substrate, and includes a plasma generator and a laser generator that irradiates the supplied solder balls with plasma to oxidize the solder balls. Film removal; the laser generating device irradiates the solder balls with laser light to melt the solder balls, while the oxide film of the solder balls is removed by the plasma irradiation unit, the solder balls are melted by the laser irradiation unit, and solder bumps are formed on the electrode pads . |