http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114806394-A

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filingDate 2022-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a2c00e303d14da31dd037fc6edb80e3
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publicationDate 2022-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-114806394-A
titleOfInvention A kind of anti-reflection layer coating, anti-reflection layer and preparation method and application thereof
abstract The invention discloses an anti-reflection layer coating, an anti-reflection layer and a preparation method and application thereof. The preparation method of the anti-reflection coating comprises the following steps: firstly dissolving at least one of a water-soluble polymer and an alcohol-soluble polymer in a solvent to obtain a polymer solution, and then adding a perfluorinated compound to the polymer solution , a dehydrating agent and a proton trapping agent are reacted. After the reaction is completed, a precipitating agent is added to obtain a precipitate; the cyclic operation of dissolving, precipitating and washing the precipitate is carried out to obtain a grafted polymer, and the grafted polymer is configured A grafted polymer solution is formed; a wetting agent, a defoaming agent and an antioxidant are added to the grafted polymer solution, and the anti-reflection layer coating is prepared after mixing uniformly. The anti-reflection coating prepared from the anti-reflection coating has a low refractive index, an extinction coefficient of 0, good film-forming properties and easy removal, and has application value in the field of chip manufacturing.
priorityDate 2022-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 50.