http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114705798-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_13dfdcebacef67f0a418c865fa90a505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_affb69125af87b37aafe26c1920c3b96 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_81217f53179fe5c7cdc75a01306ccc84 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N30-74 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N30-88 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-74 |
| filingDate | 2022-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2daaee28cff8fa4d4f277113d0a8fc26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5a0de5787e98fa27b3c193657d888bb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb45f4a1224460d1b56ba4b0a44faca6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b64f08fcd2f957209918b0d841021b62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ecd95413bd7342ce9b50811120112f51 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b80d2355002f99341ec404c6415db987 |
| publicationDate | 2022-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114705798-A |
| titleOfInvention | GC-AED technology and method for analysis and detection of germane impurities in high purity phosphine ppb content |
| abstract | The invention belongs to the field of analysis and detection of impurities in high-purity phosphine, in particular to a GC-AED technology and method for analyzing and detecting impurities in germane with ppb content in high-purity phosphine, comprising the following steps: S1, detecting atomic emission spectrometry in gas chromatography through a sample introduction system The instrument is fed with high-purity phosphine to be detected; S2, using plasma as the excitation light source to atomize the high-purity phosphine entering the gas chromatography atomic emission spectrometry detection instrument; S3, then the atoms are excited to the excited state, and then transition to the ground state, and emit Atomic spectroscopy, the present invention can analyze and detect germane impurities and other carbon-containing impurities in highly toxic gases such as phosphine, and for germane impurities, the detection limit is as low as 0.2ppb. Arsine, high-purity helium and other high-purity electronic gases can also accurately detect ppb-level impurities. |
| priorityDate | 2022-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.