| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_94f074f8660d82b641774a9795ac90ca |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-0095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-0066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-0075 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-06 |
| filingDate |
2022-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84a91fd27ebc42c3f88a74572c11c3e7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bf7594fdce234e91c5feab77c71c8a5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_186551222838d1a02a81c7875036f3a9 |
| publicationDate |
2022-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-114678452-A |
| titleOfInvention |
LED epitaxial wafer fabrication method |
| abstract |
The invention discloses a method for manufacturing an LED epitaxial wafer, which relates to the technical field of semiconductors. Multiple polystyrene microspheres; sputtering AlN film; annealing treatment to make multiple polystyrene microspheres into hollow spherical shells; growing gallium nitride epitaxial material layer; fluorine plasma treatment to make P-type nitride Part of the P-type gallium nitride layer on the upper surface of the gallium layer becomes a fluorine and magnesium co-doped gallium nitride layer. The present application can reduce the warpage and crack of the LED epitaxial wafer, improve the heat dissipation capability of the LED chip, and effectively improve the luminous efficiency and antistatic capability of the LED. |
| priorityDate |
2022-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |