http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114671395-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2558255fcfe27dd0d285efbbc509ea3e |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-092 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0048 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00269 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00301 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02 |
| filingDate | 2020-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0cf423e4bc53e3fe7dccccd78196e65 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddb7349536e07c1eccb9b6e3ff5ee3b5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9362d26062a7e1fa2dfd5abfcba12344 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27cefa75dc689c5208d9e7cc2f0b2c3b |
| publicationDate | 2022-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114671395-A |
| titleOfInvention | Semiconductor structure and its manufacturing method, MEMS device and electronic equipment |
| abstract | The present invention relates to a semiconductor structure and its manufacturing method, a MEMS device and an electronic device. The semiconductor structure includes: a first substrate having a first defining surface; a second substrate having a second defining surface, and the first defining surface and the second defining surface are opposite to each other; and a metal sealing ring structure arranged on the first defining surface and the second defining surface. Between the two defining surfaces, the sealing ring structure and the first and second defining surfaces define a accommodating space; the MEMS device, the accommodating space is suitable for accommodating the MEMS device, the MEMS device includes an input end, an output end and at least one grounding end, wherein: the grounding end , one of the input end and the output end is an electrical connection end that is electrically connected to the sealing ring structure. |
| priorityDate | 2020-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 41.