http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114641727-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bc88bd97194f6efd5707eac87958593b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-085 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2020-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b83deecd7d3b55e2edde68b697daa726 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_002dd00f69d1ea491d5c5d4a9672a293 |
| publicationDate | 2022-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114641727-A |
| titleOfInvention | Manufacturing method of photosensitive composition and preparation premix, photosensitive composition, dry film, and manufacturing method of resist film |
| abstract | The present invention provides a method for producing a chemically amplified photosensitive composition capable of reducing foreign matter derived from a sulfur-containing compound. An acid generator (A) that generates acid by irradiation with actinic rays or radiation, a sulfur-containing compound (C) that is solid at room temperature, and the polar term δp of the Hansen solubility parameter is 10 (MPa 0.5 ) or more A method for producing a chemically amplified photosensitive composition of a solvent (S1) and a solvent (S2) other than the solvent (S1), comprising: dissolving a sulfur-containing compound (C) in a solvent (S1) to prepare a sulfur-containing compound (C) ) solution; and a step of mixing the sulfur-containing compound (C) solution, the acid generator (A), and the solvent (S2). |
| priorityDate | 2019-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 680.