http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114628544-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de6a0e2be52504b4cddf1c0228549267 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_58a1ad6ed0d4e48c01fe6113e021aad5 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-125 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-167 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-167 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-12 |
| filingDate | 2022-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6a750495d221b98c812ddae4aad3430 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2932e374081e3df99020473501cae81 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87920593cdd3861e9c2a299074fd717e |
| publicationDate | 2022-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114628544-A |
| titleOfInvention | Micro pressure sensor and preparation method based on Schottky diode and ultraviolet LED |
| abstract | The invention provides a miniature pressure sensor based on a Schottky diode and an ultraviolet LED and a preparation method thereof. The structure of the miniature pressure sensor based on the Schottky diode and the ultraviolet LED is symmetrical on both sides, and includes an ultraviolet LED and a Schottky. base diode detector. The invention utilizes MEMS technology to integrate all components of the photoelectric pressure sensor on the same chip, so that the final device is small in size and light in weight, and the production cost can be reduced through mass production, which is beneficial to the application and popularization of the invention The invention adopts the photoelectric sensing principle, and has the advantages of high sensitivity, fast response speed and strong anti-electromagnetic interference ability; High-resolution pressure sensing capabilities. |
| priorityDate | 2022-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.