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filingDate 2020-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2022-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-114572942-A
titleOfInvention Multi-step nitridation process for mass production of α-phase silicon nitride and α-phase silicon nitride
abstract The invention discloses a multi-step nitridation process for mass production of α-phase silicon nitride and α-phase silicon nitride. The process includes the following steps: 1) pre-sintering silicon powder in an atmosphere containing nitrogen, and partially silicon The powder undergoes nitridation reaction to obtain a calcined product; 2) the calcined product is crushed into agglomerated debris with a size of the order of millimeters and below; 3) the crushed calcined product is calcined under a nitrogen atmosphere containing, silicon dioxide The powder continues to undergo nitridation reaction to obtain α-phase silicon nitride. The present invention proposes a multi-step nitriding process for mass production of α-phase silicon nitride. On the one hand, the problem that the mixing of the diluent in the prior art is difficult to ensure uniformity is solved by generating the silicon nitride diluent in situ; By crushing the pre-fired product, a millimeter and sub-millimeter-scale silicon powder stacking pore network is constructed, which increases the size of the gas diffusion channel by more than two orders of magnitude, and improves the consistency of the reaction microenvironment.
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Total number of triples: 35.