http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114571351-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B1-002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B31-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B31-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B27-0023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B31-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B1-005 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B31-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B31-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B31-06 |
| filingDate | 2022-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114571351-B |
| titleOfInvention | A kind of high-efficiency polishing equipment and method for silicon carbide crystal |
| abstract | The invention relates to a high-efficiency polishing equipment and method for silicon carbide crystals. The silicon carbide crystal sample is polished by using the electrochemical polishing equipment of the ring-type ultrasonic vibration working fluid. The ring-type ultrasonic vibration working fluid electrochemical polishing equipment includes Polishing disc for mechanical polishing of silicon carbide crystal specimens, inverted ultrasonic cleaning tank for applying ultrasonic vibration, electrochemical components for electrochemical processing of silicon carbide crystal specimens, auxiliary vibration components, located inside the polishing disc The working fluid, the n-shaped insulating discharge pipe used to discharge the working fluid in the polishing disc to the outside of the polishing disc, and the driving mechanism used to drive the insulating discharge pipe for discharging. The invention can carry out fine polishing and ultra-fine polishing on the surface of silicon carbide crystal, the time required for polishing is short, the polishing efficiency is high, and the damage to the subsurface damage layer is small; the polished surface has no pits and scratches, and the area of the flat area is small. big. |
| priorityDate | 2022-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 44.