http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114545188-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eeb6ca22310b9fb215cd79601eca15ec |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2601 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2022-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_230f3380b05f05cae2545c3639b110c6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ccde560ab986d818fd8c1e9dedf07ab9 |
| publicationDate | 2022-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114545188-A |
| titleOfInvention | A kind of semiconductor test equipment with strong applicability |
| abstract | The invention relates to the technical field of semiconductor testing, and discloses a semiconductor testing device with strong applicability, comprising a mirror body and a base, the bottom end of the mirror body is provided with a base, and the top end of the base is provided with a detection tray , the detection tray automatically sinks under the weight of the wafer, and the detection tray presses the piston tank at the bottom end, so that the cleaning liquid inside the piston tank is sprayed on the inside of the detection tray through the water spray pipe until the detection tray sinks to the bottom end, so that the drainage pipe Insert into the drain valve, and at the same time press the linkage hydraulic column at the bottom end of the other side of the detection tray, so that the linkage push rod extends forward and pushes the side guard plate against the detection tray. The cleaning liquid quickly falls off under the impetus of high-speed airflow, so that there is no residual liquid on the surface of the semiconductor wafer, and at the same time, the dust on the surface is synchronously washed away, thereby achieving automatic cleaning of the semiconductor surface. |
| priorityDate | 2022-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 |
Total number of triples: 14.