| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_216bc9d3d39b27fbfdaf32c8eb13dd81 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-5063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02101
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-5077
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0064
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2020-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7256cc1bb75d0d1e09957a50c0c76958
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5bfbc655d8cffa44a8f8c29d45b30f2 |
| publicationDate |
2022-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-114521285-A |
| titleOfInvention |
Solvent containing hydrofluoroether and substrate processing method using solvent containing hydrofluoroether |
| abstract |
The present invention provides a solvent containing a hydrofluoroether represented by the following formula (1). Rf 1 and Rf 2 are each independently a fluorine atom, a linear perfluoroalkyl group having 1 to 4 carbon atoms, or a branched perfluoroalkyl group having 3 or 4 carbon atoms. R 3 is a straight-chain alkyl group having 1 to 4 carbon atoms, a branched-chain alkyl group having 3 or 4 carbon atoms, a straight-chain fluoroalkyl group having 1 to 4 carbon atoms, or a 3 or 4 branched fluoroalkyl groups. At least one of Rf 1 and Rf 2 is a linear perfluoroalkyl group with 1 to 4 or less carbon atoms or a branched perfluoroalkyl group with 3 or 4 carbon atoms; |
| priorityDate |
2019-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |