Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3c5743a2eb1f90d8d75adc3b93f26c32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e53cf9cd320442ada52dd68b0c2ca9bd |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-456 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4933 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823814 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26513 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66659 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823418 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6659 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-665 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66492 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7835 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28518 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0924 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-266 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4933 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28052 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-45 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823821 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823814 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-092 |
filingDate |
2020-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a30b82c00433a75403c88fabd71d017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9801352267cd309c5c83b94ed27872b2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fcf56945994a1602066e76841bea1fd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8f853871acb929ddd7f6cf7ea3b320b |
publicationDate |
2022-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
CN-114496923-A |
titleOfInvention |
Semiconductor component and method of forming the same |
abstract |
The present disclosure relates to semiconductor components and methods of forming the same. A method of forming a semiconductor device includes: forming a gate structure on a substrate; forming a first gate spacer and a second gate spacer on opposite sidewalls of the gate structure respectively; implanting a first gate spacer in the substrate a first dopant of conductivity type to form a lightly doped source region adjacent to the first gate spacer and a lightly doped drain region adjacent to the second gate spacer; in the lightly doped forming a patterned shield over a first portion of the drain region and leaving a second portion of the lightly doped drain region exposed; and implanting the first conductivity type in the substrate in the presence of the patterned shield of the second dopant, so that the second portion of the lightly doped drain region is transformed into a drain region. |
priorityDate |
2020-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |