http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114473862-A

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publicationDate 2022-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-114473862-A
titleOfInvention A polishing fixture suitable for the surface of mercury cadmium telluride epitaxial thin film
abstract The invention discloses a polishing fixture suitable for the surface of a mercury cadmium telluride epitaxial thin film. The polishing jig is cylindrical and includes a tablet block and a counterweight block; the tablet block and the counterweight block are connected by screw threads, a concave area as a tablet groove is arranged at the center of the upper surface of the tablet block, and arcs are arranged around the area. The concave area is a regular quadrilateral, and the center of the four sides and the four corners are provided with arc-shaped grooves and slotted to the circular edge of the block. When polishing, the direction of the arc-shaped grooves is consistent with the direction of the polishing abrasive. The groove depth of the arc-shaped groove is the same as the height of the recessed area; the width of the arc-shaped groove is the same as the width of the film removal groove, and the depth of the film removal groove is greater than the height of the recessed area; the length of the film removal groove extends to the recessed area. By determining the diameter-height ratio of the polishing fixture, the curvature radius of the arc-shaped groove, the groove width, the groove depth, the position of the arc-shaped groove, the number and other parameters, the method can maximally uniform the polishing liquid on the surface of the material in the process of flattening the mercury cadmium telluride surface. The uniformity of surface polishing of mercury cadmium telluride can be effectively controlled.
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Total number of triples: 30.