http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114466951-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2e4a6b796819f27bcea8907422293203 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-40 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 |
| filingDate | 2020-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_181b20c625c9ed137f1cbece7684d3d9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_947d78d34eed42aa370e983ae847e4c0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_857edc58efb2f59879ae774f1876e5ec http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2aeca5581bc40c36c54f738b710b4076 |
| publicationDate | 2022-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114466951-A |
| titleOfInvention | Ruthenium semiconductor treatment solution and method for producing the same |
| abstract | The present invention provides a ruthenium semiconductor treatment solution containing hypobromite ions. In addition, there is provided a ruthenium-containing semiconductor treatment liquid which is obtained by adding and mixing at least a bromine-containing compound, an oxidizing agent, an alkali compound, and water, and the addition amount of the bromine-containing compound is based on the amount of bromine element relative to the total mass. 0.01 mass % or more and less than 2 mass %, the addition amount of the said oxidizing agent is 0.1 mass % or more and 10 mass % or less, and pH is 8 or more and 14 or less. Furthermore, there is provided a method for producing a ruthenium-containing semiconductor treatment liquid, which includes a step of mixing a solution containing a hypochlorous acid compound and an alkali compound with a bromine-containing compound. |
| priorityDate | 2019-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 249.