http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114465086-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_331c182dcdedb5b9ce1bbba8e07f303d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-0281 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-028 |
| filingDate | 2022-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f91d90b1d89a858a61a54a3ee6e16756 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1839baaca4dede6ac271438ae920ad8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6951966bbc8bb6bfc09a01b803ea9d7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a0bc639bb31bbdce11c6d813ec17a10 |
| publicationDate | 2022-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114465086-A |
| titleOfInvention | A kind of preparation method of DFB laser optical film |
| abstract | The invention discloses a preparation method of a DFB laser optical film, which belongs to the technical field of optical communication chip optical films. The steps of the method are as follows: placing a DFB laser in a process cavity in a chemical vapor deposition equipment, and preparing an optical film of the DFB laser by chemical vapor deposition at low temperature and low pressure; first, depositing a SiO 2 /Si laminated structure and a layer of SiO 2 to obtain a DFB laser high-reflection film; secondly, a layer of SiO 2 /Si laminated structure and a layer of SiO 2 are deposited on the light-emitting surface of the DFB laser to obtain an anti-reflection film for the DFB laser, and the preparation of the DFB laser optical film is completed. The optical film prepared by the method disclosed in the invention has a dense cross-sectional film layer, a smooth and flat surface, good transmittance, low compressive stress, good thickness uniformity, short process time and simple and easy preparation method. |
| priorityDate | 2022-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577374 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23987 |
Total number of triples: 18.