http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114446495-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_747306d01033f7d02bc9ad91570dbd09 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E30-10 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21B1-25 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21B1-25 |
| filingDate | 2022-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75667bd84a2bfbb0523e13726cef722a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7462d09c547fe4ad83fd2808d8f7adfd |
| publicationDate | 2022-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114446495-A |
| titleOfInvention | An inverted sample stage facing the plasma belt to collect exfoliants |
| abstract | The invention discloses an inverted sample stage facing plasma and having the function of collecting exfoliated objects, comprising: a negative bias voltage system, a boron nitride ceramic shielding protection system and an object stage system. The negative bias system includes a stainless steel hollow column, a stainless steel inner thread cylindrical pin, a tungsten rod, a negative bias lead wire and a stainless steel ring, and the boron nitride ceramic shielding protection system includes a boron nitride hollow column, an internal and external thread nut. and sample holder, the stage system includes sample B, boron nitride base and tungsten support. The inverted sample stage with the function of collecting exfoliated objects can collect the exfoliated objects on the surface of the sample due to irradiation damage under the action of gravity after the plasma is running. The analysis of radiation damage mechanism of materials provides sufficient experimental conditions. |
| priorityDate | 2022-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.