| abstract |
The invention provides a method for detecting the dislocation density of CVD single crystal diamond, which includes grinding, polishing and cleaning the surface to be measured of single crystal diamond, removing the mechanical damage layer on the crystal surface by chemical etching, and then using ion etching to remove the surface of the single crystal diamond. Dislocation etch pits are formed on the surface of diamond to be tested, the surface to be tested is sampled and the surface morphology is detected, the number of dislocation etch pits in the sampling area is counted, and the dislocation density of single crystal diamond is finally calculated. Detection of CVD single crystal diamond {100} or {111} plane dislocation density. |