http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114408853-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_08f13af9eed1607b6583a1306d9a1294 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-02 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00269 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02 |
| filingDate | 2021-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a951d4bbab01597ed06ea6e378a0b665 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd8b1d20b59da84ce1edf02a202c9f26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34035be8f39da3853f3396b80e62bf8d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b3f704e75ba5a532bf2e4e5c3c91253 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1c799a0306ae1f167969ae6399f7339 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d39011455553106626ad904f09ad3baf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd51164bb01a9d0670663ce1410e50f8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e65dc17231c393937e52d44ddd2b0ffb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb38c1182b8b77313cfcf964d04b4db9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02cfa48fe71b26fc4adf36c4ca8911cc |
| publicationDate | 2022-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114408853-A |
| titleOfInvention | Rigid-flexible capacitive flexible MEMS ultrasonic transducer and preparation method thereof |
| abstract | The invention discloses a rigid-flexible fusion capacitive flexible MEMS ultrasonic transducer and a preparation method thereof. The vibrating film and the lower electrode of the transducer are made of rigid materials; the base and the pillars are made of flexible materials. The vibrating membrane and the lower electrode are provided with grooves corresponding to the area on the surface of the support column, and run through the thickness direction of the vibrating membrane and the lower electrode. The invention utilizes rigid vibrating film to ensure high resonance frequency, realizes flexible design of MEMS ultrasonic transducer frequency; utilizes flexible substrate and pillar to realize flexibility of MEMS ultrasonic transducer, and solves the problem of mutual restriction between sensor frequency and flexible design; The flexible strut and the rigid film form a two-stage series vibration system, which improves the output sound pressure and receiving sensitivity; the rigid lower electrode and the rigid vibration film are used to reduce the change of the facing area between the upper and lower electrodes during the vibration process, and improve the working frequency, electromechanical coupling coefficient, The stability of performance such as receiving/transmitting sensitivity; the use of MEMS technology to realize the preparation of miniaturized, high-density two-dimensional flexible ultrasonic transducers. |
| priorityDate | 2021-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.