http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114361130-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d6a6f422b091ba12ea61d4adbf1b0e8e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-525 |
| filingDate | 2021-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af23be2c8bc8897ab58298e2bd386590 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ea49961c33f90bf05a6a0f33acc150a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff9a354c7dbffcf2389262f05924745b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e1834b655dae1c398072de20dea759c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f825c158640ca6f5b8e2f56a4d007d71 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e399428207b0dab6780170bb739bb85 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e9a0105681801e56d1f2433f4f4a017 |
| publicationDate | 2022-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114361130-A |
| titleOfInvention | Novel efuse device unit with MIM structure and preparation method thereof |
| abstract | The invention provides a novel efuse device unit with an MIM structure and a preparation method thereof, wherein the efuse device unit is formed by sequentially stacking a metal nickel layer, a nickel oxide and nickel sesquioxide mixed layer, a hafnium oxide layer, a first metal aluminum layer, an aluminum sesquioxide layer, a second metal aluminum layer and a metal layer from bottom to top; the efuse device unit is in a long strip shape, and the upper metal electrode and the lower metal electrode are used as Pad. The efuse device unit has lower manufacturing cost and can be easily applied to large-scale integrated circuit design; the Pad area of the efuse device unit is smaller, so that the consumption of leakage current can be effectively reduced, the area occupation in circuit design is reduced, and the circuit design is convenient; the efuse device unit of the invention generates less heat and does not need too much heat dissipation design, thereby facilitating the integrated manufacture of circuit design and on-line programmable hardware. |
| priorityDate | 2021-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.