http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114302512-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e2ad986e5f31eae9c60f7ad04fbcfab1 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 |
| filingDate | 2021-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abdb1ab12013f6475166fb3dc03c048f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e448963278f9ac88929babca18b126cb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_221049bae2567065b8a729242d10b4f5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ddd9e0ffeb2bbf47572f3b4860ec334 |
| publicationDate | 2022-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114302512-A |
| titleOfInvention | Heating device for high-temperature test of semiconductor device and preparation method thereof |
| abstract | The invention discloses a heating device for a high-temperature test of a semiconductor device and a preparation method thereof. The preparation method comprises the following steps: A. providing a graphite flake to be fixed on a ceramic heating piece, wherein the ceramic heating piece is arranged on the upper surface of a mounting seat; B. coating an adhesive containing graphite powder on the surface of the ceramic heating sheet, and coating a graphite sheet on the ceramic heating sheet; C. heating and applying pressure to the graphite sheet to cure the adhesive and secure the graphite sheet to the ceramic heat-generating sheet. The heating device provided by the invention has better heat-conducting property under the condition of high temperature or longer test time, has good stability and reduces the workload of device maintenance. |
| priorityDate | 2021-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.