http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114280901-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate | 2022-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114280901-B |
| titleOfInvention | A kind of high-precision resist stripping liquid composition with low dynamic surface tension and preparation method thereof |
| abstract | The invention discloses a high-precision resist stripping liquid composition with low dynamic surface tension and a preparation method thereof, comprising 2-8% by weight of organic amine, 25-70% by weight of protic organic solvent, 25-70% by weight of organic parts by weight of aprotic organic solvents, 0.3-3% by weight of additives, and 0.1-0.5% by weight of surfactants; the total weight of the above components is 100%. The preparation method includes: S1: adding aprotic organic solvent; S2: continuously stirring, adding protic organic solvent; S3: continuously stirring, adding organic amine, and controlling the temperature within 40 DEG C; S4: continuously stirring, adding additives and surface The active agent is circulated for more than 3 hours to obtain a mixed solution; S5: the mixed solution is filtered through a filter to obtain a finished stripping solution composition. The invention has good stripping performance, is beneficial to enhance the dissolving and cleaning performance of the stripping solution for the resist, ensures the compatibility of the stripping solution for the Cu process and the Al process, and effectively reduces the complexity of the production line process. |
| priorityDate | 2022-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 70.