| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ef9dfc2fd00887cc7dc608913ce18e41 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate |
2021-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00c10a2b9c29a9ba47dc5a51217d7082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5112dd09c42af63724d5e29725aaaf63
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a87d09c6f9a820e54f156e26c22feb04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e9243cc9dd5d112cde5a5c59e6dc5c2 |
| publicationDate |
2022-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-114280374-A |
| titleOfInvention |
Method for testing sheet resistance of doped silicon carbide film |
| abstract |
The invention discloses a method for testing sheet resistance of a doped silicon carbide film by preparing an electrode on the surface of the doped silicon carbide film. |
| priorityDate |
2021-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |