| abstract |
The invention relates to a high-density high-temperature oxidation-resistant molybdenum-based composite target and a preparation method thereof. The molybdenum-based composite target comprises a molybdenum base and an oxide, and the oxide at least comprises one of aluminum oxide and chromium oxide, And the mass ratio of molybdenum base and alumina is (90-99):(0-5), and the mass ratio of molybdenum base and chromium oxide is (90-99):(0-5). The invention adopts a hydrothermal method to prepare a nanoscale oxide secondary phase with high purity, good dispersion, good shape and controllable size, and adopts a liquid-liquid doping technology to ensure that the precursors are uniformly mixed. The introduction of the secondary phase inhibits the gas phase migration process, refines the composite powder, and finally obtains a nearly spherical nanocomposite powder. Compared with the existing smelting method and wet chemical method, the invention has the advantages of lower cost, more convenient operation and stronger applicability, and the prepared molybdenum-based composite target has extremely high density and high-temperature oxidation resistance. It has broad prospects for large-scale industrial application. |