http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114217199-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_306eab9a9cf52330f6f09745c082bda4 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-26 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
filingDate | 2021-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3119d1ceefda89e7272e1aa971bf7cd7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c1f4c07cec852019dacb0502f7d4d78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c0189c02f45ea7f44746a6a9772cd4a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57489e8787cbfa3e7b3beff34717e7cd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed43d8973372e208685f395eacfdacff http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04037d54c9bc62599f27a9d6240a682b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32c420215559f8e9737fbb64bbaa2863 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_903f2824b25b12f0376bef53fae01dcb |
publicationDate | 2022-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-114217199-A |
titleOfInvention | Method and device for realizing 1/f noise variable temperature test of semiconductor device |
abstract | The invention relates to a method and a device for realizing 1/f noise variable temperature test of a semiconductor device, the method comprises the steps of firstly constructing a variable temperature environment of a sample to be tested in the 1/f noise test of the semiconductor device, expanding a room temperature test box of a 1/f noise test system to a variable temperature chamber, and constructing an 81K-500K continuously adjustable variable temperature environment by the variable temperature chamber by utilizing the steady state bubble principle for temperature control; secondly, designing a sample holder and a sample clamp plate in the temperature-changing chamber, realizing the installation of various packaged semiconductor devices in the temperature-changing environment and the rapid temperature transmission in the packaged semiconductor devices, designing a bias and test data transmission path of a sample to be tested, and realizing the electrical connection and noise parameter transmission between a measuring resistance unit of the 1/f noise test system and the sample to be tested in the temperature-changing chamber. The invention can realize the 1/f noise test of various packaged semiconductor devices in an 81K-500K continuously adjustable temperature environment, and is used for the low-frequency noise test of the semiconductor devices and the test and analysis of the defects of the semiconductor devices. |
priorityDate | 2021-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.