| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03K3-017 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32183 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2020-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d57c9a548157b3e95973755a43104647
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef30c14bdb1b137d04663296b4f756d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f60d02deaa1a229ed80debb05d854ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c3743fd6a7d4f70fa1d2d3d699152a9 |
| publicationDate |
2022-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-114041201-A |
| titleOfInvention |
System and method for multistage pulses in RF plasma tools |
| abstract |
Systems and methods for multilevel pulses are described. The systems and methods include generating four or more states. During each of the four or more states, a radio frequency (RF) generator generates an RF signal. The RF signal has four or more power levels, and each of the four or more power levels corresponds to the four or more states. The multilevel pulses facilitate finer control in processing the substrate. |
| priorityDate |
2019-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |