http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114038848-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_85e4740d8eb8981b7846e1887e6c82b4 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-088 |
| filingDate | 2021-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a5c9cebde7110c5ba6787767711f091 |
| publicationDate | 2022-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114038848-A |
| titleOfInvention | Semiconductor device and method for manufacturing the same |
| abstract | The invention provides a preparation method of a semiconductor device, which comprises the following steps: providing a substrate with a groove, wherein a grid structure and a side wall structure are formed on the substrate; forming a first seed layer in the groove; forming a second seed layer on the first seed layer; and filling an epitaxial body layer in the groove and forming a cap layer on the epitaxial body layer, wherein the concentration of the doped P/N type conductive ions in the second seed layer is greater than that of the doped P/N type conductive ions in the first seed layer. The present invention provides a semiconductor device including: the substrate formed with the groove and the first seed layer, the second seed layer and the epitaxial body layer formed in the groove. According to the method, the first seed layer and the second seed layer are sequentially formed in the groove, and the doping concentration of the second seed layer is greater than that of P/N type conductive ions in the first seed layer, so that the carrier mobility in a channel region (groove position) of a device can be effectively improved, and the performance and yield of the device are improved. |
| priorityDate | 2021-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426098968 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327157 |
Total number of triples: 13.