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publicationDate 2022-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-113924483-A
titleOfInvention sensor device
abstract The sensor device (1) comprises a substrate having a substrate surface, a first IDT electrode (11), a second IDT electrode (12) and a waveguide (20). The first IDT electrode and the second IDT electrode are located on the surface of the substrate. The waveguide is located on the surface of the substrate between the first IDT electrode and the second IDT electrode. At least one of the first IDT electrode and the second IDT electrode includes a reference electrode (11G, 12G) and a signal electrode (11A, 12A), the reference electrode and the signal electrode each include a plurality of electrode fingers (11X, 12X), and the plurality of electrodes Refers to juxtaposition in one direction. The distance between the at least one of the first IDT electrode and the second IDT electrode and the waveguide is shorter than the interval between the reference electrode and the signal electrode in the one direction.
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