| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-128
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7682 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-3121 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02 |
| filingDate |
2015-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d6ddb7f39bfefd2cb57382c1ea4a90b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df3bdc3b700b16c25e9b1abeed817583
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfd2464d2020ca3c964fbb6ae25f208d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4c954df0af6ef338f303e0956a541fa |
| publicationDate |
2022-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-113884539-A |
| titleOfInvention |
Gas sensor, integrated circuit device using same, and manufacturing method thereof |
| abstract |
The present invention provides a gas sensor including a substrate, a heater, a dielectric layer, a sensing electrode and a gas sensitive film. The substrate has a sensing region and a surrounding region surrounding the sensing region, and the substrate also has an opening disposed in the sensing region. Set the heater to be at least above the opening and have a resistivity of the heater greater than approximately 6 x 10 ‑8 ohm m. A dielectric layer is disposed on the heater. The sensing electrodes are disposed on the dielectric layer. The gas sensitive film is arranged on the sensing electrode. The present invention also provides an integrated circuit device using the gas sensor and a method of manufacturing the same. |
| priorityDate |
2015-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |