http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113819899-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0242 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01C19-5783 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01C19-5783 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 |
| filingDate | 2021-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-113819899-B |
| titleOfInvention | Heterogeneous integrated surface-mounted gyroscope |
| abstract | The invention provides a heterogeneous integrated surface-mounted gyroscope which comprises a bottom plate, an MEMS gyroscope chip and a cover plate, wherein a boss is arranged on the front surface of the bottom plate, a chip electrode is arranged on the boss, and a plurality of first electrodes electrically connected with the chip electrode are arranged on the back surface of the bottom plate; the active area of the MEMS gyroscope chip is welded on the boss and is electrically connected with the chip electrode through a bump electrode; the cover plate is packaged on the front face of the bottom plate, a vacuum cavity is reserved between the cover plate and the bottom plate, and the MEMS gyroscope chip is located in the vacuum cavity. The MEMS gyroscope chip is welded on the boss in an inverted buckle mode, the base plate and the cover plate package the MEMS gyroscope chip, surface-mounted package of the quartz MEMS gyroscope is achieved, miniaturization of the size can be achieved under the condition that performance of the quartz MEMS gyroscope is not lost, and integration is easier to achieve. |
| priorityDate | 2021-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.