http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113802119-B
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-162 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 |
filingDate | 2021-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2022-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2022-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-113802119-B |
titleOfInvention | Fabrication process of high-precision metal microelectrodes for general PDMS flexible sensors |
abstract | This application proposes a general process for preparing high-precision metal micro-electrodes for PDMS flexible sensors. The existing metal films are prepared by photolithography to prepare micro-scale electrode arrays. After PDMS encapsulation, the device can maintain good elasticity and biological phase. Capacitive while retaining the high conductivity and toughness of metal electrodes. The PDMS flexible devices prepared by this process can be used in biological implant devices, such as neurostimulators, pacemakers, cochlear implants, etc. |
priorityDate | 2021-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.