http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113802119-B

Outgoing Links

Predicate Object
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-162
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18
filingDate 2021-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2022-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-113802119-B
titleOfInvention Fabrication process of high-precision metal microelectrodes for general PDMS flexible sensors
abstract This application proposes a general process for preparing high-precision metal micro-electrodes for PDMS flexible sensors. The existing metal films are prepared by photolithography to prepare micro-scale electrode arrays. After PDMS encapsulation, the device can maintain good elasticity and biological phase. Capacitive while retaining the high conductivity and toughness of metal electrodes. The PDMS flexible devices prepared by this process can be used in biological implant devices, such as neurostimulators, pacemakers, cochlear implants, etc.
priorityDate 2021-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 26.