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filingDate 2021-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d68499554b7fd388c5d9b6d38098541
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publicationDate 2021-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-113782631-A
titleOfInvention Heterojunction solar cell with buffer protective film and preparation method thereof
abstract The invention discloses a heterojunction solar cell with a buffer protective film and a preparation method thereof, the heterojunction solar cell comprises a crystalline silicon substrate (1), amorphous silicon intrinsic layers (2) are deposited on the front surface and the back surface of the crystalline silicon substrate, N-type and P-type doped amorphous silicon layers are respectively deposited on the outer sides of the amorphous silicon intrinsic layers, a buffer protective transparent conductive film (5) is deposited on the outer side of the P-type doped amorphous silicon layer (4), a transparent conductive layer (6) is prepared by depositing the buffer protective transparent conductive film and the outer side of the N-type doped amorphous silicon layer (3), and a metal electrode (7) is arranged on the outer side of the transparent conductive layer, the preparation method comprises the following steps: and depositing a buffer protection transparent conductive film on the P-type doped amorphous silicon layer by adopting a vapor deposition method, and depositing a transparent conductive layer on the buffer protection transparent conductive film and the N-type amorphous silicon by adopting a magnetron sputtering method. The invention greatly reduces the bombardment damage of low-energy particles to the doped amorphous silicon layer, protects the PN junction performance of the heterojunction cell and improves the performance of the heterojunction solar cell.
priorityDate 2021-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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