| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd81894f9f5d01b2ee812a00998f2503
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3df5d3aee261d80ef53752a76198522b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3d6691003f1308fc75d38d12b4e284b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f2834aee0a10f3797af95705998b5fba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4b98f513775f37f14fe75f85116b823d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-074
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N2-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N2-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-50 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N2-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N2-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-314
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-083 |
| filingDate |
2021-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d15a97504d599823f7bc5716cfa1ff9b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3864c30f6d0a56300406bbc4cad74e0b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b734ba814038e047b5d17ca8356ccc23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4cb33e32f52a4430bed8987e3274cee0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3283b714233bea659507ebde5750488c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05360c72434d456097ef203afab1c150
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c66276a987a8e1f49ccd3307f4824e0e |
| publicationDate |
2021-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-113764570-A |
| titleOfInvention |
Piezoelectric structure and preparation method thereof |
| abstract |
The invention provides a piezoelectric structure and a preparation method thereof. The piezoelectric structure comprises: a piezoelectric film layer; a seed layer located on one side surface of the piezoelectric film layer; nanowires located on the side surface of the seed layer away from the piezoelectric film layer The material of the array layer and the nanowire array layer is semiconductor piezoelectric material. When the deformation occurs under the external action, the piezoelectric film layer and the nanowire array layer produce a piezoelectric effect, and opposite charges are generated on the two opposite surfaces of the piezoelectric film layer and the two opposite surfaces of the nanowire array layer. The seed layer located between the two is subjected to the action of an electric field. Under the action of the above electric field, the seed layer realizes the series connection of the piezoelectric film layer and the nanowire array layer. The addition of the electric energy generated by the line array layer effectively improves the piezoelectric conversion efficiency of the piezoelectric material. |
| priorityDate |
2021-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |