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filingDate 2020-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99b60614228c81641b2da809df10af21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e911ed87a731d9c7cb8aec5d330d447
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publicationDate 2021-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-113710761-A
titleOfInvention Surface-Coated Abrasive Particles for Tungsten Polishing Applications
abstract The present invention provides a chemical mechanical polishing composition comprising: (a) an abrasive comprising silica particles and alumina particles, wherein the alumina particles are surface-coated with an anionic polymer; and (b) water . The present invention also provides a method of chemically mechanically polishing substrates, particularly substrates comprising tungsten, silicon oxide, and nitride, using the polishing composition.
priorityDate 2019-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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