http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113707535-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e2dbb7044174b9553227b0c1b10950d8 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02019 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 |
| filingDate | 2021-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d4dec1ca0d4359c13328041c11c02f4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_080dd987615db5455013fa7f87aa5d7a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0fb77a847e3488d25b480a0f09c5f9a |
| publicationDate | 2021-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-113707535-A |
| titleOfInvention | Method for etching indium phosphide wafer |
| abstract | The invention discloses a corrosion method of an indium phosphide wafer, and relates to the technical field of semiconductor materials. According to the corrosion method of the indium phosphide wafer, the wafer is subjected to pre-cleaning and then subjected to corrosion twice, the wafer is subjected to corrosion treatment by adopting a primary corrosion solution and a secondary corrosion solution respectively in the corrosion twice, and the raw materials of the primary corrosion solution comprise hydrogen peroxide, sulfuric acid, citric acid and glacial acetic acid. The invention discloses an indium phosphide wafer etching method, which can etch a wafer body, does not need to grind again even if the wafer is touched, does not need cooling equipment in the etching process, and can directly etch the wafer at normal temperature. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114540033-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115491203-A |
| priorityDate | 2021-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.