| abstract |
An object of the present invention is to provide an adhesive solution with high solution stability, and to provide a pellicle assembly with less adhesive residue and suppressed generation of outgassing by using the adhesive solution. The present invention is a pellicle assembly comprising a pellicle frame, a pellicle laid on one end face of the pellicle frame, and an adhesive layer disposed on the other end face of the pellicle frame, the pellicle In the assembly, the adhesive layer contains a (meth)acrylic adhesive, which is a cured product of a resin composition comprising a polymer (A) and a radical polymerization initiator (B), The polymer (A) has a structural unit derived from a (meth)acrylate, and a side chain containing a group containing a carbon-carbon multiple bond. |