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filingDate 2021-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2021-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-113675298-A
titleOfInvention TOPCon crystal silicon solar cell with nano-micron structure
abstract A TOPCon crystalline silicon solar cell implementation method with a nano-micron structure is characterized in that after a micron structure pyramid is prepared on the front side of an n-type crystalline silicon substrate by adopting an alkaline solution, a silicon nano-pillar array or a metal nano-particle array is prepared on the micron structure pyramid; then forming a p-n junction on the front surface through high-temperature boron diffusion, and preparing a silicon oxide/doped polysilicon laminated structure on the back surface through an LPCVD method or a PVD method; and finally, covering the aluminum oxide/hydrogenated silicon nitride laminated layer and the metal Ag/Al grid line on the p-n junction on the front surface in sequence, and covering the hydrogenated silicon nitride layer and the metal Ag grid line on the silicon oxide/doped polysilicon laminated structure on the back surface. The invention can obviously reduce the reflectivity of the silicon wafer to incident light, thereby enabling more photons to be absorbed by the crystalline silicon substrate, simultaneously, the new suede structure does not bring about larger carrier recombination, and the efficiency of the cell is comparable to that of the conventional cell.
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