http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113629054-A

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filingDate 2021-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a17beb131a4bb3f45c8411ce5f7fc03
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publicationDate 2021-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-113629054-A
titleOfInvention U-shaped transistor array and method of forming the same, semiconductor device and method of forming the same
abstract Embodiments of the present application provide a U-shaped transistor array and a method for forming the same, a semiconductor device and a method for forming the same, wherein the U-shaped transistor array includes a plurality of U-shaped transistors arranged along a first direction and a second direction respectively; A U-shaped transistor includes: a channel region; a source electrode located at a first end of the channel region; a drain electrode located at a second end of the channel region, wherein the first end and the second end are respectively the channel region at the first end Two opposite ends in three directions; the first end and the second end have different sizes in the first direction; the source electrode, the channel region and the drain electrode form a U-shaped structure; the gate electrode, the channel region is located at the gate electrode The gate oxide layer is located between the channel region and the gate electrode; the plane formed by the first direction and the second direction is perpendicular to the third direction; the third direction is the thickness direction of the wafer forming the channel region .
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114220765-A
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priorityDate 2021-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 33.