patent/CN-113620252-B

Predicate	Object
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B7-195
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B7-19
filingDate	2020-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2022-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate	2022-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	CN-113620252-B
titleOfInvention	Electronic grade hydrofluoric acid manufacturing system and method for manufacturing electronic grade hydrofluoric acid
abstract	An electronic-grade hydrofluoric acid manufacturing system and a method for manufacturing electronic-grade hydrofluoric acid, by controlling the boiling point and condensation temperature of anhydrous hydrofluoric acid, through multi-stage gasification and condensation, the impurities in the anhydrous hydrofluoric acid are eliminated. It can be removed, and then the gaseous hydrofluoric acid is filtered, absorbed, and cooled to obtain electronic grade hydrofluoric acid products.
priorityDate	2020-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006111487-A
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457280313 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449935498 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453034310 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID516892

Total number of triples: 18.