http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113567824-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2603 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2021-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-113567824-B |
| titleOfInvention | Device and method for measuring thermal resistance of GaN device nucleation layer based on picosecond laser |
| abstract | A device and method for measuring thermal resistance of a gallium nitride device nucleation layer based on a picosecond laser, which is mainly composed of a heating and power measurement subsystem, a transient thermal response measurement subsystem, and a measurement guarantee subsystem. And the power measurement subsystem includes picosecond laser heating, electrical heating and electrical temperature detection modules, the method is to use the structure function method to calculate the layered thermal resistance. The method includes a picosecond laser heating step and an electrical heating step. First, a picosecond laser is used to heat a thin layer of a semiconductor device, then an electrical acquisition method is used to measure the temperature, and an electrical heating and an electrical detection method are used to perform the equivalent electrical energy of the laser heating. Heating power is determined. The problem that the existing technology cannot perform the thermal resistance test of the nucleation layer of the gallium nitride HEMT device in the micrometer scale is solved. The interpolation calculation method of voltage and temperature calibration curves is adopted to avoid the influence of nonlinear parameters. |
| priorityDate | 2021-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559169 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID117559 |
Total number of triples: 12.