http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113544499-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_581924d894df3ce9a7c490b320aaea6a |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-127 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-0039 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-00 |
filingDate | 2020-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b0fe82cd601d641f160e7e52d44e1d9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b184b106607538cd03023a2d71a5437a |
publicationDate | 2021-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-113544499-A |
titleOfInvention | Resistive metal oxide gas sensor, method of making the same, and method of operating the same |
abstract | A resistive metal oxide gas sensor comprises a support structure and a porous sensing layer (1) arranged on or partially contained in the support structure. The electrode (2) is in electrical communication with the porous sensing layer (1), and the heater (3) is in thermal communication with the porous sensing layer (1). The heater (3) is operable to heat the porous sensing layer (1) to a target temperature to allow determination of the presence or concentration of the target gas, ozone, based on the sensing signal provided via the electrodes (2). The porous sensing layer (1) comprises a network of interconnected single crystal metal oxide nanoparticles (14) and a gas selective coating (12) of the network. The thickness (t1) of the porous sensing layer (1) is at most 10 μm. The coating (12) comprises one or more of silicon oxide and silicon nitride and has a thickness (t12) of less than 5 nm. |
priorityDate | 2019-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 54.