| abstract |
The present application relates to a capacitor and a preparation method thereof. Compared with the capacitor obtained by the existing manufacturing method, in the present application, the conventional process adopts wet etching to remove the sacrificial mold layer and replaces it with a dry stripping process, and then performs a wet cleaning process. Through the dry process of the whole process, Therefore, the problem of tilting or even collapse of the bottom electrode caused by the surface tension generated by the wet process can be effectively solved. |